e-Beam Lithography and CAD documentation

TU Delft

Kavli Institute of Nanoscience

Kavli Institute of Quantum Nanoscience

Kavli Nanolab Delft

EBPG5000Plus HS 20bit B017 - EBPG5200 HS A217

Reservation system (The living database - Powered by PhoeniX)


Introduction courses EBL:

Basic intro course e-Beam Lithography
Advanced intro course e-Beam Lithography

Equipment:

EBPG5000Plus HS 20bit B017
EBPG5200 HS A217

Software:

Access to the CAD systems

(Layout)BEAMER (Pattern data preparation):

Version 4.6.0-6 Manual [html] Manual [pdf] Training Videos [wmv] What's new ?
Version 4.7.0 Manual [html] Manual [pdf] Training Videos [wmv] What's new ? GPF AppNote
Version 4.8.0-1 Manual [html] Manual [pdf] Training Videos [wmv] What's new ?
Version 5.0.0-6 Manual [html] Manual [pdf] Training Videos [wmv] What's new ?
Version 5.1.0-4 Manual [html] Manual [pdf] Training Videos [wmv]
Version 5.2.0-2 Manual [html] Manual [pdf] Training Videos [wmv] GPF AppNote
Version 5.3.0-6 Manual [html] Manual [pdf] Training Videos [wmv] What's new ? GPF AppNote
Version 5.4.0-4 Manual [html] Manual [pdf] Training Videos [wmv]
Version 5.5.0 Manual [html] Manual [pdf] Training Videos [wmv]
Release Notes [pdf]

Presentations GenISys BEAMeeting 2014 Delft

TRACER (PEC Point spread function simulation):

Version 2.1.0 Manual [html] Manual [pdf] Training Videos [wmv] What's new ?
Version 2.2.0-1 Manual [html] Manual [pdf] Training Videos [wmv]
Version 2.3.0 Manual [html] Manual [pdf] Training Videos [wmv] What's new ?
Version 2.4.0 Manual [html] Manual [pdf] Training Videos [wmv]
Release Notes [pdf]

LDM (Design of patterns in ASCII text format):

Basic LDM syntax
Kavli Nanolab extensions to LDM
LDM to TeXtLib conversion

Kavli Nanolab Special pattern tools available on the EBPGs:

KNringsgpf
txl2gpf

Useful applications:

MobaXterm Windows X11 Server

Various links:

Reservation system (The Living Database - Powered by PhoeniX)

FileMaker Server 13 databases:

(New) Kavli Nanolab User database
All available databases